Multi-Field Analysis and Experimental Verification on Piezoelectric Valve-Less Pumps Actuated by Centrifugal Force

A piezoelectric centrifugal pump was developed previously to overcome the low frequency responses of piezoelectric pumps with check valves and liquid reflux of conventional valveless piezoelectric pumps. However, the electro-mechanical-fluidic analysis on this pump has not been done. Therefore, multi-field analysis and experimental verification on piezoelectrically actuated centrifugal valveless pumps are conducted for liquid transport applications. The valveless pump consists of two piezoelectric sheets and a metal tube with piezoelectric elements pushing the metal tube to swing at the first bending resonant frequency. The centrifugal force generated by the swinging motion will force the liquid out of the metal tube. The governing equations for the solid and fluid domains are established, and the coupling relations of the mechanical, electrical and fluid fields are described. The bending resonant frequency and bending mode in solid domain are discussed, and the liquid flow rate, velocity profile, and gauge pressure are investigated in fluid domain. The working frequency and flow rate concerning different components sizes are analyzed and verified through experiments to guide the pump design. A fabricated prototype with an outer diameter of 2.2 mm and a length of 80 mm produced the largest flow rate of 13.8 mL/min at backpressure of 0.8 kPa with driving voltage of 80 Vpp. By solving the electro-mechanical-fluidic coupling problem, the model developed can provide theoretical guidance on the optimization of centrifugal valveless pump characters.

[1]  S. Yesilyurt,et al.  Simulation-based analysis of flow due to traveling-plane-wave deformations on elastic thin-film actuators in micropumps , 2008 .

[2]  Gregory P. Carman,et al.  Development of a high flow-rate/high operating frequency nitinol MEMS valve , 2008, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[3]  H. K. Ma,et al.  Development of a piezoelectric micropump with novel separable design for medical applications , 2015 .

[4]  Bakhtier Farouk,et al.  Multifield analysis of a piezoelectric valveless micropump: effects of actuation frequency and electric potential , 2012 .

[5]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[6]  Xinxia Cai,et al.  A disposable piezoelectric micropump with high performance for closed-loop insulin therapy system , 2010 .

[7]  Yi-Chu Hsu,et al.  An experimental and numerical investigation into the effects of diffuser valves in polymethylmethacrylate (PMMA) peristaltic micropumps , 2008 .

[8]  Yu Ting Ma,et al.  Miniature tubular centrifugal piezoelectric pump utilizing wobbling motion , 2010 .

[9]  J. G. Smits Piezoelectric micropump with three valves working peristaltically , 1990 .

[10]  X. Zha,et al.  Study on a piezoelectric micropump for the controlled drug delivery system , 2007 .

[11]  Yuan Wang,et al.  3D FEM analyses on flow field characteristics of the valveless piezoelectric pump , 2016 .

[12]  Albert Folch,et al.  Microvalves and Micropumps for BioMEMS , 2011, Micromachines.

[13]  Zhonghua Zhang,et al.  Effects of driving mode on the performance of multiple-chamber piezoelectric pumps with multiple actuators , 2015 .

[14]  C.C. Chou,et al.  Electromechanical analysis of an asymmetric piezoelectric/elastic laminate structure: theory and experiment , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[15]  Gregory W. Auner,et al.  Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design , 2011 .

[16]  Chunsheng Zhao,et al.  Simulation analysis and experimental verification of spiral-tube-type valveless piezoelectric pump with gyroscopic effect , 2014 .

[17]  Steve Beeby,et al.  A novel fabrication process to realise a valveless micropump on a flexible substrate , 2013 .

[18]  Siu Wing Or,et al.  Design of a Piezoelectric-hydraulic Pump with Active Valves , 2004 .

[19]  A. Cardenas-Valencia,et al.  Development of various designs of low-power, MEMS valves for fluidic applications , 2007 .

[20]  Jianhui Zhang,et al.  Analysis of the flow rate characteristics of valveless piezoelectric pump with fractal-like Y-shape branching tubes , 2014 .

[21]  Suresh V. Garimella,et al.  Recent advances in microscale pumping technologies: a review and evaluation , 2008 .

[22]  Peter Woias,et al.  A generic analytical model for micro-diaphragm pumps with active valves , 2005 .

[23]  Yi Chun Wang,et al.  Loss characteristics and flow rectification property of diffuser valves for micropump applications , 2009 .

[24]  Jun Huang,et al.  Theory and experimental verification on valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes , 2013 .

[25]  Zhonghua Zhang,et al.  A piezoelectric micropump with an integrated sensor based on space-division multiplexing , 2013 .

[26]  Zensheu Chang,et al.  Piezoelectrically actuated miniature peristaltic pump , 2001, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[27]  G. Stemme,et al.  A valveless diffuser/nozzle-based fluid pump , 1993 .