The Computer Simulation System for Range Distribution of Ion Implantation

In this paper, the integrated software system named JTU PRII (Jiaotong University Project Range of Ion Implantation), which is based on the transport theory and Monte Carlo method and is develped by ourselves for range distribution of ion implantation, is introduced. The system generally possesses versatility、 efficiency and practicality. As for versatility, the system can build and utilize the parameter bank of various ions and material bank of various parts, can caculate the range distributions of implanted ions in the target for various conditions, such as for different incident ions, for different compositions and shapes of targets, for different energies、 doses and angles of incidence; As for efficiency, the computations are accelerated greatly by using some numerical simulating formulae instead of numerical iterative solution in key procedure and using fixed fly path instead of random fly path; As for practicality, the preassumptions of the simulation are closer to the reality and the simulating results are more accurate because the sputtering and the dynamic changes of targetic composition during penetration are considered and the advanced Monte Carlo method is used. Compared to other similar softwares, such as famous TRIM and SASAMAL, it is more beautiful for surface, more convenient for operaion, it can call, compute, compare, commnt, copy and print all curves needed, and the simulating results consist with the experiments very well.