Growth, Structure and Pattern Formation for Thin Films

An epitaxial thin film consists of layers of atoms whose lattice properties are determined by those of the underlying substrate. This paper reviews mathematical modeling, analysis and simulation of growth, structure and pattern formation for epitaxial systems, using an island dynamics/level set method for growth and a lattice statics model for strain. Epitaxial growth involves physics on both atomistic and continuum length scales. For example, diffusion of adatoms can be coarse-grained, but nucleation of new islands and breakup for existing islands are best described atomistically. In heteroepitaxial growth, mismatch between the lattice spacing of the substrate and the film will introduce a strain into the film, which can significantly influence the material structure, for example leading to formation of quantum dots. Technological applications of epitaxial structures, such as quantum dot arrays, require a degree of geometric uniformity that has been difficult to achieve. Modeling and simulation may contribute insights that will help to overcome this problem. We present simulations that combine growth and strain showing the structure of nanocrystals and the formation of patterns in epitaxial systems.

[1]  J. A. Venables,et al.  Rate equation approaches to thin film nucleation kinetics , 1973 .

[2]  A. P. Alivisatos,et al.  Epitaxial growth and photochemical annealing of graded CdS/ZnS shells on colloidal CdSe nanorods. , 2002, Journal of the American Chemical Society.

[3]  G. Bauer,et al.  Structural properties of self-organized semiconductor nanostructures , 2004 .

[4]  Ronald Fedkiw,et al.  Level set methods and dynamic implicit surfaces , 2002, Applied mathematical sciences.

[5]  J. Krug,et al.  Islands, mounds, and atoms , 2003 .

[6]  Zangwill,et al.  Morphological instability of a terrace edge during step-flow growth. , 1990, Physical review. B, Condensed matter.

[7]  Giovanni Russo,et al.  Computation of strained epitaxial growth in three dimensions by kinetic Monte Carlo , 2006, J. Comput. Phys..

[8]  D. Chopp A Level-Set Method for Simulating Island Coarsening , 2000 .

[9]  Subramanian S. Iyer,et al.  The kinetics of fast steps on crystal surfaces and its application to the molecular beam epitaxy of silicon , 1988 .

[10]  Bales,et al.  Dynamics of irreversible island growth during submonolayer epitaxy. , 1994, Physical review. B, Condensed matter.

[11]  A Zangwill,et al.  Level set approach to reversible epitaxial growth. , 2001, Physical review. E, Statistical, nonlinear, and soft matter physics.

[12]  Stroscio,et al.  Scaling of diffusion-mediated island growth in iron-on-iron homoepitaxy. , 1994, Physical review. B, Condensed matter.

[13]  Young-Ju Lee,et al.  Exact Artificial Boundary Conditions for Continuum and Discrete Elasticity , 2006, SIAM J. Appl. Math..

[14]  B. Merriman,et al.  Kinetic model for a step edge in epitaxial growth. , 1999, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[15]  Strain dependence of surface diffusion: Ag on Ag(111) and Pt(111) , 1997, cond-mat/9702025.

[16]  A. Madhukar,et al.  Onset of incoherency and defect introduction in the initial stages of molecular beam epitaxical growth of highly strained InxGa1−xAs on GaAs(100) , 1990 .

[17]  Xiaogang Peng,et al.  Epitaxial Growth of Highly Luminescent CdSe/CdS Core/Shell Nanocrystals with Photostability and Electronic Accessibility , 1997 .

[18]  J. Sethian,et al.  Fronts propagating with curvature-dependent speed: algorithms based on Hamilton-Jacobi formulations , 1988 .

[19]  Russel E. Caflisch,et al.  Level set simulation of directed self-assembly during epitaxial growth , 2006 .

[20]  R. Caflisch,et al.  The elastic field of a surface step: the Marchenko-Parshin formula in the linear case , 2006 .

[21]  Possible mechanism for the onset of step-bunching instabilities during the epitaxy of single-species crystalline films , 2007 .

[22]  James A. Sethian,et al.  A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography I: Algorithms and T , 1995 .

[23]  W. K. Burton,et al.  The growth of crystals and the equilibrium structure of their surfaces , 1951, Philosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences.

[24]  Cao,et al.  Synthesis and Characterization of InAs/InP and InAs/CdSe Core/Shell Nanocrystals. , 1999, Angewandte Chemie.

[25]  F. Baumann,et al.  Continuum model of thin film deposition incorporating finite atomic length scales , 2002 .

[26]  Alex M. Andrew,et al.  Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision, and Materials Science (2nd edition) , 2000 .

[27]  S. Osher,et al.  Algorithms Based on Hamilton-Jacobi Formulations , 1988 .

[28]  Myung-joo Kang,et al.  Fluctuations and scaling in aggregation phenomena , 2000 .

[29]  P. Smereka Spiral crystal growth , 2000 .

[30]  Peter Kratzer,et al.  Effect of strain on surface diffusion in semiconductor heteroepitaxy , 2001 .

[31]  Chi-Hang Lam,et al.  Island, pit, and groove formation in strained heteroepitaxy. , 2005, Physical review letters.

[32]  Strain in layered nanocrystals , 2005, European Journal of Applied Mathematics.

[33]  Submonolayer epitaxy without a critical nucleus , 1995, cond-mat/9503117.

[34]  J. Sethian,et al.  A level set approach to a unified model for etching, deposition, and lithography II: three-dimensional simulations , 1995 .

[35]  D. Vvedensky Atomistic modeling of epitaxial growth: comparisons between lattice models and experiment , 1996 .

[36]  Jinchao Xu,et al.  An application of multigrid methods for a discrete elastic model for epitaxial systems , 2006, J. Comput. Phys..

[37]  U. Banin,et al.  Synthesis and Properties of CdSe/ZnS Core/Shell Nanorods. , 2003 .

[38]  Bo Li,et al.  Analysis of Island Dynamics in Epitaxial Growth of Thin Films , 2003, Multiscale Model. Simul..

[39]  Ronald Fedkiw,et al.  A level set method for thin film epitaxial growth , 2001 .

[40]  Max G. Lagally,et al.  KINETIC PATHWAY IN STRANSKI-KRASTANOV GROWTH OF Ge ON Si(001) , 1990 .

[41]  Axel Voigt,et al.  A Step-Flow Model for the Heteroepitaxial Growth of Strained, Substitutional, Binary Alloy Films with Phase Segregation: I. Theory , 2007, Multiscale Model. Simul..

[42]  Dieter Bimberg,et al.  Spontaneous ordering of nanostructures on crystal surfaces , 1999 .

[43]  Eaglesham,et al.  Dislocation-free Stranski-Krastanow growth of Ge on Si(100). , 1990, Physical review letters.

[44]  R. Caflisch,et al.  Theory of strain relaxation in heteroepitaxial systems , 2003 .

[45]  R. Caflisch,et al.  Level-set method for island dynamics in epitaxial growth , 2002 .