Ordering dynamics of surfaces in molecular beam epitaxy

Abstract The growth of thin films under conditions typical for molecular beam epitaxy is unstable, if potential barriers at step edges suppress the diffusion of adatoms to lower terraces. In these cases the dynamic evolution of the surface morphology is characterized by slope selection leading to pyramid-like structures and coarsening. The late stages of growth can be described by Langevin equations that are similar to equations that model spinodal decomposition or Ostwald ripening with the slope of the surface profile being the order parameter. It is shown that the surface evolution can be understood in terms of domain ordering, however, the orientation of the domain walls is strongly influenced by lattice anisotropies. This coupling slows down the coarsening dynamics.

[1]  Sander,et al.  Stable and unstable growth in molecular beam epitaxy. , 1994, Physical review letters.

[2]  D. Huse,et al.  Corrections to late-stage behavior in spinodal decomposition: Lifshitz-Slyozov scaling and Monte Carlo simulations. , 1986, Physical review. B, Condensed matter.

[3]  M. Plischke,et al.  Slope selection and coarsening in molecular beam epitaxy. , 1994, Physical review letters.

[4]  B. Chakraverty.  Grain size distribution in thin films—1. Conservative systems , 1967 .

[5]  Sander,et al.  Coarsening of Unstable Surface Features during Fe(001) Homoepitaxy. , 1995, Physical review letters.

[6]  W. Mullins.  Theory of Thermal Grooving , 1957 .

[7]  Evans,et al.  Low-temperature epitaxial growth of thin metal films. , 1990, Physical review. B, Condensed matter.

[8]  D. Vvedensky,et al.  Stochastic equations of motion for epitaxial growth. , 1993, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[9]  I. H. Öğüş,et al.  NATO ASI Series , 1997 .

[10]  G. W. Smith,et al.  Real-time laser-light scattering studies of surface topography development during GaAs MBE growth , 1993 .

[11]  Evans.  Factors mediating smoothness in epitaxial thin-film growth. , 1991, Physical review. B, Condensed matter.

[12]  Bray Aj.  Renormalization-group approach to domain-growth scaling. , 1990 .

[13]  Siegert,et al.  Instability in surface growth with diffusion. , 1992, Physical review letters.

[14]  Weber,et al.  Dynamic Evolution of Pyramid Structures during Growth of Epitaxial Fe(001) Films. , 1995, Physical review letters.

[15]  Ernst,et al.  Observation of a growth instability during low temperature molecular beam epitaxy. , 1994, Physical review letters.

[16]  Evans,et al.  Transition to Multilayer Kinetic Roughening for Metal (100) Homoepitaxy. , 1995, Physical review letters.

[17]  J. E. Hilliard,et al.  Free Energy of a Nonuniform System. I. Interfacial Free Energy , 1958 .

[18]  Greene,et al.  Surface morphology during multilayer epitaxial growth of Ge(001). , 1995, Physical review letters.

[19]  Bott,et al.  Inversion of growth speed anisotropy in two dimensions. , 1993, Physical review letters.

[20]  Politi,et al.  Ehrlich-Schwoebel instability in molecular-beam epitaxy: A minimal model. , 1996, Physical review. B, Condensed matter.

[21]  I. Lifshitz,et al.  The kinetics of precipitation from supersaturated solid solutions , 1961 .

[22]  F. Hudda,et al.  Atomic View of Surface Self‐Diffusion: Tungsten on Tungsten , 1966 .

[23]  Siegert.  Determining exponents in models of kinetic surface roughening. , 1996, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[24]  M. Plischke,et al.  Solid-on-solid models of molecular-beam epitaxy. , 1994, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[25]  Krug,et al.  Surface diffusion currents and the universality classes of growth. , 1993, Physical review letters.

[26]  Bray.  Exact renormalization-group results for domain-growth scaling in spinodal decomposition. , 1989, Physical review letters.