Analysis, design, fabrication, and testing of a MEMS switch for power applications

[1]  John S. Townsend,et al.  The Theory of Ionization of Gases by Collision , 2007 .

[2]  Wen H. Ko,et al.  Touch mode capacitive pressure sensors , 1999 .

[3]  Xi-Qing Sun,et al.  A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation , 1999 .

[4]  Adele E. Schmitz,et al.  GaAs-compatible surface-micromachined RF MEMS switches , 1999 .

[5]  Chang-Jin Kim,et al.  Lateral polysilicon microrelays with a mercury microdrop contact , 1998, IEEE Trans. Ind. Electron..

[6]  Elliott R. Brown,et al.  RF-MEMS switches for reconfigurable integrated circuits , 1998 .

[7]  M. Mehregany,et al.  Contact physics of gold microcontacts for MEMS switches , 1998, Electrical Contacts - 1998. Proceedings of the Forty-Fourth IEEE Holm Conference on Electrical Contacts (Cat. No.98CB36238).

[8]  S. Eshelman,et al.  Performance of low-loss RF MEMS capacitive switches , 1998 .

[9]  Oliver Brand,et al.  Fully integrated magnetically actuated micromachined relays , 1998 .

[10]  E. Fullin,et al.  A new basic technology for magnetic micro-actuators , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[11]  J. Schimkat,et al.  Contact materials for microrelays , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[12]  K. R. Farmer,et al.  A bistable microrelay based on two-segment multimorph cantilever actuators , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[13]  Cam Nguyen,et al.  Microelectromechanical devices for wireless communications , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[14]  Shuichi Miyazaki,et al.  Stress-Optimised Shape Memory Devices for the Use in Microvalves , 1997 .

[15]  C. Kim,et al.  A liquid-filled microrelay with a moving mercury microdrop , 1997 .

[16]  Takuya Nakajima,et al.  Thermal buckling actuator for micro relays , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[17]  G. K. Ananthasuresh,et al.  Nonlinear electromechanical behaviour of an electrostatic microrelay , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[18]  M. Allen,et al.  Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[19]  J. O. Mur-Miranda,et al.  Power MEMS and microengines , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[20]  Yu-Chong Tai,et al.  A large-force, fully-integrated MEMS magnetic actuator , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[21]  Bernd Hillerich,et al.  Micromechanical relay with electrostatic actuation , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[22]  P. Zavracky,et al.  Measurement and modelling of surface micromachined, electrostatically actuated microswitches , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[23]  Manfred Kohl,et al.  Linear microactuators based on the shape memory effect , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[24]  S. Senturia,et al.  M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures , 1997 .

[25]  P. Zavracky,et al.  Micromechanical switches fabricated using nickel surface micromachining , 1997 .

[26]  S. Eshelman,et al.  Characteristics of micromachined switches at microwave frequencies , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.

[27]  M. F. Chang,et al.  A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[28]  M. Stuber,et al.  An Electrostatfcally Actuated Micro-relay , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[29]  W. Menz,et al.  Fully Batch Fabricated Magnetic Microactuators Using A Two Layer Liga Process , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[30]  Akinori Watabe,et al.  Thermally Controlled Magnetization Microrelay , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[31]  Shuvo Roy,et al.  Fabrication of electrostatic nickel microrelays by nickel surface micromachining , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[32]  C. Linder,et al.  Electrostatic polysilicon microrelays integrated with MOSFETs , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[33]  M. K. Andrews,et al.  A comparison of squeeze-film theory with measurements on a microstructure , 1993 .

[34]  Hiroshi Hosaka,et al.  Electromagnetic microrelays: concepts and fundamental characteristics , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[35]  A. Johnson,et al.  Microactuators of thin film shape memory alloy on silicon , 1992 .

[36]  H. Tilmans.  Micro-mechanical sensors using encapsulated built-in resonant strain gauges , 1991 .

[37]  Helmut Seidel,et al.  The mechanism of anisotropic, electrochemical silicon etching in alkaline solutions , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[38]  M. Sakata.  An electrostatic microactuator for electro-mechanical relay , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[39]  Gilbert Strang,et al.  Introduction to applied mathematics , 1988 .

[40]  D. Bogy,et al.  An Elastic-Plastic Model for the Contact of Rough Surfaces , 1987 .

[41]  W. Tillar Shugg,et al.  Handbook of Electrical and Electronic Insulating Materials , 1986 .

[42]  E. Kunhardt,et al.  Electrical Breakdown and Discharges in Gases: Part A Fundamental Processes and Breakdown , 1983 .

[43]  Gerold W. Neudeck,et al.  The PN junction diode , 1982 .

[44]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[45]  Mario Di Giovanni,et al.  Flat and Corrugated Diaphragm Design Handbook , 1982 .

[46]  Tom Forester,et al.  Microelectronics Revolution , 1981 .

[47]  K. Petersen.  Micromechanical membrane switches on silicon , 1979 .

[48]  F. Bastien,et al.  Electrical breakdown in gases , 1977, Digest of Literature on Dielectrics, Volume 41, 1977.

[49]  Sanborn C. Brown,et al.  Introduction to Electrical Discharges in Gases , 1968 .

[50]  F. H. Jackson,et al.  Analytical Methods in Vibrations , 1967 .

[51]  R. Finne,et al.  A Water‐Amine‐Complexing Agent System for Etching Silicon , 1967 .

[52]  J. Greenwood,et al.  Contact of nominally flat surfaces , 1966, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[53]  H. H. Richardson,et al.  A Study of Fluid Squeeze-Film Damping , 1966 .

[54]  W. E. Langlois.  Isothermal squeeze films , 1961 .

[55]  A. Chattopadhyay,et al.  Heat and thermodynamics , 1952 .

[56]  L. Germer,et al.  A Low Voltage Discharge between Very Close Electrodes , 1948 .

[57]  D. Tabor.  Hardness of Metals , 1937, Nature.

[58]  M. Sakata,et al.  Micromachined relay which utilizes single crystal silicon electrostatic actuator , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[59]  E. Beyne,et al.  A fully-packaged electromagnetic microrelay , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[60]  A. Hirata,et al.  A micromechanical switch as the logic elements for circuits in multi chip module on Si (MCM-Si) , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[61]  R. Vollertsen,et al.  Burn-In , 1999, 1999 IEEE International Integrated Reliability Workshop Final Report (Cat. No. 99TH8460).

[62]  Charles L. Goldsmith,et al.  Performance of Low-Loss RF , 1998 .

[63]  S. K. Panda.  1997 INTERNATIONAL CONFERENCE ON , 1997 .

[64]  Peter M. Osterberg,et al.  Electrostatically actuated microelectromechanical test structures for material property measurement , 1995 .

[65]  Michael Allan Huff,et al.  Silicon micromachined wafer-bonded valves , 1993 .

[66]  John D. Busch,et al.  Fabrication of silicon-based shape memory alloy micro-actuators , 1992 .

[67]  George C. Verghese,et al.  Principles of Power Electronics , 2023 .

[68]  P. Lin.  The in-situ measurement of mechanical properties of multi-layer coatings , 1990 .

[69]  M. Mehregany.  Application of micromachined structures to the study of mechanical properties and adhesion of thin films , 1986 .

[70]  J. Lienhard.  A heat transfer textbook , 1981 .

[71]  J. J. O'Dwyer,et al.  The theory of electrical conduction and breakdown in solid dielectrics , 1973 .

[72]  R. Holm.  Electric contacts; theory and application , 1967 .

[73]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[74]  F. Paschen,et al.  Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drucken erforderliche Potentialdifferenz , 1889 .