Bulk micromachined pressure sensor
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Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
[1] K. Wise,et al. Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors , 1979, IEEE Transactions on Electron Devices.