Effect of Postdeposition Annealing Temperatures on Electrical Characteristics of Molecular-Beam-Deposited HfO2 on n-InAs/InGaAs Metal–Oxide–Semiconductor Capacitors
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M. Hudait | K. Kakushima | Yueh-Chin Lin | E. Chang | Y. Wong | Yan-Gu Lin | H. Trinh | Huan-Chung Wang | T. Kawanago | H. Iwai | Chia‐Hua Chang | Chi-Ming Chen | Guan-Ning Huang