Industrial applications of excimer ultraviolet sources

Abstract Ultraviolet ( UV ) radiation sources have enormous potential for materials processing. This potential has already been demonstrated in several areas, including curing of adhesives and other polymers, deposition of thin activation layers for further plating of electronic circuitry, and in the plating of plastics of EMI shielding. New excimer UV sources have been developed which can replace the large and costly laser systems currently used in many applications. The development and application of excimer UV sources at ABB are described. A brief introduction to excimer theory is given.