Flexible and Surface-Mountable Piezoelectric Sensor Arrays for Underwater Sensing in Marine Vehicles

In an effort to improve the situational awareness and obstacle avoidance of marine vehicles, we fabricate, package and characterize Pb (Zr0.52Ti0.48)O3 thin-film piezoelectric pressure sensor arrays for passive fish-like underwater sensing. We use floating bottom electrode in designing the sensor which made the sensor able to detect very low frequency range (down to 0.1 Hz) in water. The proposed array of sensors is capable of locating underwater objects by transducing the pressure variations generated by the stimulus. The sensors are packaged into an array of 2 × 5 on a flexible liquid crystal polymer substrate patterned with gold interconnects. Experiments in this paper are divided into three main categories. First, in order to evaluate the effect of water on the sensor performance, resonant frequency, and quality factor changes in air and water are investigated theoretically and experimentally. Second, the ability of the array in locating a vibrating sphere (dipole) in water is illustrated through experiments. The sensors demonstrate a high resolution of 3 mms-1 in detecting in detecting oscillatory flow velocity in water. Third, “real-time” experiments are conducted in a swimming pool environment by surface mounting two arrays of sensors on the curved hull of a kayak vehicle. The arrays are self-powered and do not need any external power supply, to operate, which greatly benefits in eliminating the need of bulky power supplies on underwater vehicles.

[1]  Jeffrey H. Lang,et al.  Lateral-line inspired sensor arrays for navigation and object identification , 2011 .

[2]  A. Ghysen,et al.  The lateral line microcosmos. , 2007, Genes & development.

[3]  Yingchen Yang,et al.  Artificial lateral line canal for hydrodynamic detection , 2011 .

[4]  Douglas L. Jones,et al.  Multisensor Processing Algorithms for Underwater Dipole Localization and Tracking Using MEMS Artificial Lateral-Line Sensors , 2006, EURASIP J. Adv. Signal Process..

[5]  Michael S. Triantafyllou,et al.  A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications , 2011 .

[6]  Sheryl Coombs,et al.  Biology of the mechanosensory lateral line in fishes , 1995, Reviews in Fish Biology and Fisheries.

[7]  A. G. P. Kottapalli,et al.  Piezoelectric sensor array for passive fish-like underwater sensing , 2012, 2012 IEEE Sensors.

[8]  Michael S. Triantafyllou,et al.  Development and testing of bio-inspired microelectromechanical pressure sensor arrays for increased situational awareness for marine vehicles , 2013 .

[9]  Michael S. Triantafyllou,et al.  A flexible liquid crystal polymer MEMS pressure sensor array for fish-like underwater sensing , 2012 .

[10]  J. Montgomery,et al.  The Mechanosensory Lateral Line System of the Hypogean form of Astyanax Fasciatus , 2001, Environmental Biology of Fishes.

[11]  H. Bleckmann Reception of hydrodynamic stimuli in aquatic and semiaquatic animals , 1994 .

[12]  Shekhar Bhansali,et al.  Reinforced piezoresistive pressure sensor for ocean depth measurements , 2008 .

[13]  C. Campenhausen,et al.  Detection of stationary objects by the blind Cave FishAnoptichthys jordani (Characidae) , 1981, Journal of comparative physiology.

[14]  Nannan Chen,et al.  Hydrogel‐Encapsulated Microfabricated Haircells Mimicking Fish Cupula Neuromast , 2007 .

[15]  William W. Clark,et al.  Effect of electrode pattern on the performance of unimorph piezoelectric diaphragm actuators , 2005, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[16]  K. Ekinci Electromechanical transducers at the nanoscale: actuation and sensing of motion in nanoelectromechanical systems (NEMS). , 2005, Small.

[17]  Jianmin Miao,et al.  Acoustic transducers with a perforated damping backplate based on PZT/silicon wafer bonding technique , 2009 .

[18]  Jianmin Miao,et al.  Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors , 2011 .

[19]  Jianmin Miao,et al.  Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms , 2010 .

[20]  Matthew J. McHenry,et al.  The biomechanics of sensory organs , 2009 .

[21]  Jianmin Miao,et al.  Micromachined ultrasonic transducers and arrays based on piezoelectric thick film , 2008 .

[22]  Douglas L. Jones,et al.  Distant touch hydrodynamic imaging with an artificial lateral line , 2006, Proceedings of the National Academy of Sciences.