Infrared gas spectrometer based on a pyroelectric thin film array detector

We present a infrared gas spectrometer which is based on a pyroelectric thin film array showing a flat response from the visible to the far infrared. The integration of a monolithic linear detector array as a thin film onto silicon offers a low thermal time constant, and the spectrometer is capable of simultaneous detection of different gases without any moving part or cooling equipment. The resulting system yields a low cost solution for industrial and environmental monitoring applications.