Sol-gel multimode interference power splitters
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We report on the design and fabrication of 1/spl times/32 MMI power splitters through the sol-gel process. The MMI splitter is designed for 1.55-/spl mu/m wavelength and characterized in terms of tolerance, wavelength response, and polarization sensitivity. The splitter is then UV-imprinted in aluminosilicate material coated on SiO/sub 2/. It is found that the responses of fabricated and designed splitter are in good agreement, with an excess loss of /spl sim/0.75 dB and power uniformity of /spl sim/0.95 dB.
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