Electron back-scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscope

Abstract It is shown that the angular distribution of back-scattered electrons can be observed in a scanning electron microscope, and that the patterns observed can be used to obtain crystallographic information about the specimen. The patterns are termed electron back-scattering patterns (E.B.S.P.). The use of these patterns as a crystallographic techniques is shown to have several significant advantages over two other techniques currently in use in scanning electron microscopes.