论文信息 - 2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering

2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering

A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.

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