Ionization Radiation Effects And Mechanisms

A systematic approach for predicting radiation stability of materials and devices is presented. The conceptual basis is a consideration of the radiolysis potentially occurring in x-ray-irradiated materials as a multi-stage process: a) primary radiation excitations ( PRE ); b) secondary generation of isolated electronic and structural defects resulting from PRE relaxation; and c) interaction, accumulation, and coagulation of defects resulting in change of device electronic properties and in degradation of optical material. This predictive technique involves specific relevant information in a relatively simple context for the purpose of modeling the radiolysis process. It should find general application in selecting materials for x-ray optical elements such as masks, filters, windows where resistance to radiolysis is required as well as for photoresists where radiolytic sensitivity is necessary.