Beam monitoring enhances Deep Proton Lithography : towards high-quality micro-optical components 298

In this paper we will explain the importance of a well controlled and accurately positioned ion beam profile in Deep Lithography with Protons (DLP) to prototype high-quality micro-optical components. We will illustrate how to that aim, we implemented two types of Beam Profile Monitors (BPM) in our inhouse beam line. A first BPM device is based on two four-segment apertures that allow to monitor the beam position, while a second one uses a Scintillating Fiber Optic Plate (SFOP) and a CCD camera to visualize the beam profile.