Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets
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[1] Fei-Long Chen,et al. A neural-network approach to recognize defect spatial pattern in semiconductor fabrication , 2000 .
[2] Way Kuo,et al. Model-based clustering for integrated circuit yield enhancement , 2007, Eur. J. Oper. Res..
[3] Chen-Fu Chien,et al. A new morphology-based approach for similarity searching on wafer bin maps in semiconductor manufacturing , 2012, Proceedings of the 2012 IEEE 16th International Conference on Computer Supported Cooperative Work in Design (CSCWD).
[4] Wen-Chih Wang,et al. Data mining for yield enhancement in semiconductor manufacturing and an empirical study , 2007, Expert Syst. Appl..
[5] Jin Wang,et al. Large-Scale Semiconductor Process Fault Detection Using a Fast Pattern Recognition-Based Method , 2010, IEEE Transactions on Semiconductor Manufacturing.
[6] Way Kuo,et al. A model-based clustering approach to the recognition of the spatial defect patterns produced during semiconductor fabrication , 2007 .
[7] Scott MacKinnon,et al. Statistical methods for visual defect metrology , 1998 .
[8] H. Hajj,et al. Wafer Classification Using Support Vector Machines , 2012, IEEE Transactions on Semiconductor Manufacturing.
[9] Robert W. Dutton,et al. IEEE Transactions on Semiconductor Manufacturing , 2005 .
[10] Geoffrey E. Hinton,et al. Reducing the Dimensionality of Data with Neural Networks , 2006, Science.
[11] Rafael C. González,et al. Local Determination of a Moving Contrast Edge , 1985, IEEE Transactions on Pattern Analysis and Machine Intelligence.
[12] Suk Joo Bae,et al. Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes , 2011, IEEE Transactions on Semiconductor Manufacturing.
[13] Tao Yuan,et al. Bayesian spatial defect pattern recognition in semiconductor fabrication using support vector clustering , 2010 .
[14] Tao Yuan,et al. Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference , 2008, Eur. J. Oper. Res..
[15] W. Marsden. I and J , 2012 .
[16] Kenneth W. Tobin,et al. Feature analysis and classification of manufacturing signatures based on semiconductor wafer maps , 1997, Electronic Imaging.
[17] Yiming Yang,et al. Support vector machines classification with a very large-scale taxonomy , 2005, SKDD.
[18] Chris A Mack,et al. Fifty Years of Moore's Law , 2011, IEEE Transactions on Semiconductor Manufacturing.
[19] Chih-Jen Lin,et al. LIBSVM: A library for support vector machines , 2011, TIST.
[20] Chen-Fu Chien,et al. A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence , 2013 .
[21] K.P. White,et al. Classification of Defect Clusters on Semiconductor Wafers Via the Hough Transformation , 2008, IEEE Transactions on Semiconductor Manufacturing.
[22] Kenneth W. Tobin,et al. Application of spatial signature analysis to electrical test data: validation study , 1999, Advanced Lithography.
[23] Chih-Jen Lin,et al. A Practical Guide to Support Vector Classication , 2008 .
[24] Chih-Hsuan Wang,et al. Recognition of semiconductor defect patterns using spatial filtering and spectral clustering , 2008, Expert Syst. Appl..
[25] Corinna Cortes,et al. Support-Vector Networks , 1995, Machine Learning.
[26] Kenneth W. Tobin,et al. Automatic classification of spatial signatures on semiconductor wafer maps , 1997, Advanced Lithography.
[27] Linda G. Shapiro,et al. Computer and Robot Vision , 1991 .
[28] R. Keys. Cubic convolution interpolation for digital image processing , 1981 .
[29] Pascal Vincent,et al. Representation Learning: A Review and New Perspectives , 2012, IEEE Transactions on Pattern Analysis and Machine Intelligence.
[30] G.E. Moore,et al. Cramming More Components Onto Integrated Circuits , 1998, Proceedings of the IEEE.