Dual excitation multiphase electrostatic drive

A novel electrostatic drive technology, named the dual excitation multiphase electrostatic drive (DEMED) is presented. A basic DEMED consists of two plastic films in which three-phase parallel electrodes are embedded and is driven by three-phase AC excitation to the electrodes. Static characteristics of DEMED are calculated and tested and the results agree very well. Three prototype motors of DEMED are fabricated using commercially available techniques. The first prototype consists of a single slider and stator and generates a linear motion with a slider motion range of about 5 mm. It weighs 7 g and generates a power of 1.6 W and a thrust force of 4.4 N. The second prototype consists of a 50 layer stack of linear motors, summing their outputs. It weighs 3.6 kg and generates a propulsive force of 310 N being powered with boosted commercial three-phase electricity. The third prototype consists of a rotor and a stator in which electrodes are arranged radially and generate rotational motion. A maximum power of 3.6 mW was generated by the prototype weighing only 260 mg for its rotor and stator. From the results of the numerical calculation, a practical design methodology for the motor is determined. An optimal design for a motor employing currently available material and fabrication techniques is provided as an example. Analyses predict that force generation over the interfacial area between the slider and stator of this motor would be 3900 N/m/sup 2/.