BaTiO3 thin films are deposited onto (111)-Si/Ti/Pt using a hybrid DC-field enhanced pulsed laser deposition (PLD)-technique with excimer laser radiation. Space- and time-resolved plasma emission spectroscopy (PES) is used for determination of the mean velocity of the particle species within the plasma/vapour. The structural properties of the films are characterised by XRD-measurements and micro-Raman spectroscopy. The electrical properties are analysed by impedance measurements. The electric field influences the number of excited and ionised particles within the ambient gas and plasma, caused by a discharge in the ambient gas and interaction between ambient gas and plasma. The hybrid process allows production of crystalline films of the tetragonal phase at reduced deposition temperatures. Dielectric constants of up to er=320 are obtained.
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