Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator

[1]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[2]  J. G. Smits,et al.  The constituent equations of piezoelectric bimorphs , 1989, Proceedings., IEEE Ultrasonics Symposium,.

[3]  Jan G. Smits,et al.  The constituent equations of piezoelectric bimorphs , 1991 .

[4]  P. Hauptmann.  Sensors: A Comprehensive Survey , 1996 .

[5]  Tomomasa Sato,et al.  Micro object handling system with concentrated visual fields and new handling skills , 1996, Proceedings of IEEE International Conference on Robotics and Automation.

[6]  Tomomasa Sato,et al.  Mechanical assembly of three-dimensional microstructures from fine particles , 1996, Adv. Robotics.

[7]  Norio Shinya,et al.  Adhesion force measurement system for micro-objects in a scanning electron microscope , 2000 .

[8]  Imad H. Elhajj,et al.  A 2-D PVDF force sensing system for micro-manipulation and micro-assembly , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[9]  Rajesh Rajamani,et al.  A novel dual-axis electrostatic microactuation system for micromanipulation , 2002, IEEE/RSJ International Conference on Intelligent Robots and Systems.

[10]  N. Chaillet,et al.  The constitutive equations of a piezoelectric duo-bimorph , 2003, Proceedings of the IEEE International Symposium onAssembly and Task Planning, 2003..

[11]  Rajesh Rajamani,et al.  Actively servoed multi-axis microforce sensors , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[12]  Ieee Robotics.  Proceedings, 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003), October 27-31,2003, Las Vegas, Nevada , 2003 .

[13]  C. Clevy,et al.  Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation , 2005, IEEE/ASME Transactions on Mechatronics.