Surface-micromachined gear trains driven by an on-chip electrostatic microengine

Test results for a polysilicon, surface-micromachined, electrostatically-actuated microengine driving multiple gears are presented. The microengine provides output in the form of a continuously rotating output gear (50 /spl mu/m in diameter) that is capable of delivering torque to additional geared mechanisms. The microengine can be operated at varying speeds and its motion can be reversed. A rotational speed of up to 200000 r/min while driving multiple gears has been obtained. Drive of a 1600 /spl mu/m diameter optical shutter has also been demonstrated. The resultant microengine and gear train, produced by polysilicon surface-micromachining techniques, are completely batch-fabricated without the need for piece-part assembly.

[1]  J. J. Smegowski,et al.  An Application Of Mechanical Leverage To Microactuation , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[2]  R. J. Collins,et al.  Performance impact of monolayer coating of polysilicon micromotors , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[3]  Albert P. Pisano,et al.  Fluid-powered rotary gears and micro-flow channels , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[4]  J. J. Sniegowski,et al.  The design and modelling of a comb-drive-based microengine for mechanism drive applications , 1992 .

[5]  William C. Tang,et al.  Laterally Driven Polysilicon Resonant Microstructures , 1989 .

[6]  R. Howe.  Surface micromachining for microsensors and microactuators , 1988 .

[7]  Ernest J. Garcia,et al.  Microfabricated actuators and their application to optics , 1995, Photonics West.

[8]  K. J. Gabriel,et al.  In situ friction and wear measurements in integrated polysilicon mechanisms , 1990 .

[9]  M. Mehregany,et al.  A simple fabrication process for polysilicon side-drive micromotors , 1994 .

[10]  Ernest J. Garcia,et al.  Surface micromachined microengine , 1995 .

[11]  Francis L. Merat,et al.  Integrated micro-opto-mechanical systems , 1995, Photonics West.

[12]  R. Muller,et al.  IC-processed electrostatic micromotors , 1989 .

[13]  J. J. Sniegowski,et al.  Surface Micromachined Microengane As The Driver For Micromechanical Gears , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[14]  J. H. Lang,et al.  Operation of microfabricated harmonic and ordinary side-drive motors , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[15]  Yu-Chong Tai,et al.  IC-processed electrostatic synchronous micromotors , 1989 .