Vacuum-sealed silicon micromachined incandescent light source
暂无分享,去创建一个
[1] S. Sugiyama,et al. Micro-diaphragm pressure sensor , 1986, 1986 International Electron Devices Meeting.
[2] H. Yoshihara,et al. Silicon Nitride Single-Layer X-Ray Mask , 1981 .
[3] D. W. Burns,et al. Fabrication techniques for integrated sensor microstructures , 1986, 1986 International Electron Devices Meeting.
[4] H. A. Schafft,et al. Second breakdown—A comprehensive review , 1967 .
[5] P. Pleshko,et al. Performance and design considerations of the thin-film tungsten matrix display , 1973 .
[6] Yu-Chong Tai,et al. Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films , 1990 .
[7] V. I. Belyĭ. Silicon nitride in electronics , 1988 .
[8] R. Howe. Surface micromachining for microsensors and microactuators , 1988 .
[9] W. R. Runyan,et al. Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH4 ‐ NH 3 ‐ H 2 System , 1967 .
[10] H. Philipp. Optical Properties of Silicon Nitride , 1973 .