Precipitation of arsenic diffused into silicon from a TiSi2 source
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S. Lombardo | P. Baeri | C. Spinella | V. Privitera | E. Rimini | V. Raineri | F. Via | G. Ferla
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S. Lombardo | P. Baeri | C. Spinella | V. Privitera | E. Rimini | V. Raineri | F. Via | G. Ferla