Engineering Quantum Nanophotonic Components from Hexagonal Boron Nitride

Integrated quantum photonics (IQP) provides a path to practical, scalable quantum computation, communications and information processing. Realization of an IQP platform requires controlled engineering of many nanophotonic components. However, the range of materials for monolithic platforms is limited by the simultaneous need for high‐quality quantum light sources, high optical performance, and availability of scalable nanofabrication techniques. Here, the fabrication of IQP components from the recently emerged material hexagonal boron nitride (hBN), including tapered waveguides, microdisks, and 1D and 2D photonic crystal cavities, is demonstrated. Resonators with quality factors greater than 4000 are achieved, and proof‐of‐principle complex, free‐standing IQP circuitry fabricated from single‐crystal hBN is engineered. The results show the potential of hBN for scalable integrated quantum technologies.

[1]  T. Taniguchi,et al.  High‐Q Nanophotonics over the Full Visible Spectrum Enabled by Hexagonal Boron Nitride Metasurfaces , 2022, Advanced materials.

[2]  C. Ning,et al.  Large-Scale, High-Yield Laser Fabrication of Bright and Pure Single-Photon Emitters at Room Temperature in Hexagonal Boron Nitride. , 2022, ACS nano.

[3]  M. Lukin,et al.  Robust multi-qubit quantum network node with integrated error detection , 2022, Science.

[4]  M. Helm,et al.  Unveiling the Zero-Phonon Line of the Boron Vacancy Center by Cavity-Enhanced Emission. , 2022, Nano letters.

[5]  Q. Gong,et al.  The potential and global outlook of integrated photonics for quantum technologies , 2021, Nature Reviews Physics.

[6]  P. Lagoudakis,et al.  Single-photon nonlinearity at room temperature , 2021, Nature.

[7]  Johannes E. Fröch,et al.  Purcell Enhancement of a Cavity-Coupled Emitter in Hexagonal Boron Nitride. , 2021, Small.

[8]  Steven F. Lee,et al.  Quantum Emitter Localization in Layer-Engineered Hexagonal Boron Nitride. , 2021, ACS nano.

[9]  Johannes E. Fröch,et al.  Integration of hBN Quantum Emitters in Monolithically Fabricated Waveguides , 2021, ACS Photonics.

[10]  V. Shalaev,et al.  Creating Quantum Emitters in Hexagonal Boron Nitride Deterministically on Chip-Compatible Substrates. , 2021, Nano letters.

[11]  Navin B. Lingaraju,et al.  2022 Roadmap on integrated quantum photonics , 2021, Journal of Physics: Photonics.

[12]  M. Kamp,et al.  Purcell-Enhanced Single Photon Source Based on a Deterministically Placed WSe2 Monolayer Quantum Dot in a Circular Bragg Grating Cavity. , 2021, Nano letters.

[13]  Kenji Watanabe,et al.  Position-controlled quantum emitters with reproducible emission wavelength in hexagonal boron nitride , 2020, Nature Communications.

[14]  I. Gerhardt,et al.  Single organic molecules for photonic quantum technologies , 2020, Nature Materials.

[15]  C. Schuck,et al.  Integration of Diamond-Based Quantum Emitters with Nanophotonic Circuits. , 2020, Nano letters.

[16]  W. Pernice,et al.  Coherent characterisation of a single molecule in a photonic black box , 2020, Nature Communications.

[17]  Weidong Zhou,et al.  Microcavity-coupled emitters in hexagonal boron nitride , 2019, Nanophotonics.

[18]  Chien-Chih Tseng,et al.  Wafer-scale single-crystal hexagonal boron nitride monolayers on Cu (111) , 2020, Nature.

[19]  David O. Bracher,et al.  Purcell enhancement of a single silicon carbide color center with coherent spin control. , 2020, Nano letters.

[20]  Dirk Englund,et al.  Large-scale integration of artificial atoms in hybrid photonic circuits , 2020, Nature.

[21]  Fabio Sciarrino,et al.  Integrated photonic quantum technologies , 2019, Nature Photonics.

[22]  B. Gil,et al.  Photonics with hexagonal boron nitride , 2019, Nature Reviews Materials.

[23]  V. Sandoghdar,et al.  Coherent coupling of single molecules to on-chip ring resonators , 2019, New Journal of Physics.

[24]  S. F. Covre da Silva,et al.  Resonance Fluorescence of GaAs Quantum Dots with Near-Unity Photon Indistinguishability , 2019, Nano letters.

[25]  Johannes E. Fröch,et al.  Photonic Nanostructures from Hexagonal Boron Nitride , 2018, Advanced Optical Materials.

[26]  C. Jagadish,et al.  Flow modulation epitaxy of hexagonal boron nitride , 2018, 2D Materials.

[27]  A. Majumdar,et al.  Ultrathin van der Waals Metalenses. , 2018, Nano letters.

[28]  Johannes E. Fröch,et al.  Photonic crystal cavities from hexagonal boron nitride , 2018, Nature Communications.

[29]  K. Loh,et al.  Whisper Gallery Modes in Monolayer Tungsten Disulfide-Hexagonal Boron Nitride Optical Cavity , 2017 .

[30]  A. Wieck,et al.  Spin–photon interface and spin-controlled photon switching in a nanobeam waveguide , 2017, Nature Nanotechnology.

[31]  Sae Woo Nam,et al.  Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices , 2016, Nature Communications.

[32]  M. K. Bhaskar,et al.  An integrated diamond nanophotonics platform for quantum-optical networks , 2016, Science.

[33]  Yan-Kai Tzeng,et al.  Nanodiamond Integration with Photonic Devices , 2016, Laser & Photonics Reviews.

[34]  David O. Bracher,et al.  Selective Purcell enhancement of two closely linked zero-phonon transitions of a silicon carbide color center , 2016, Proceedings of the National Academy of Sciences.

[35]  Gregory R. Steinbrecher,et al.  Large-scale quantum photonic circuits in silicon , 2016 .

[36]  M. Thompson,et al.  GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits , 2016, 1601.06956.

[37]  Dirk Englund,et al.  Coherent spin control of a nanocavity-enhanced qubit in diamond , 2014, Nature Communications.

[38]  Takashi Taniguchi,et al.  Direct-bandgap properties and evidence for ultraviolet lasing of hexagonal boron nitride single crystal , 2004, Nature materials.

[39]  J. Joannopoulos,et al.  Photonic crystals: putting a new twist on light , 1997, Nature.

[40]  Seung Choi,et al.  ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? J ? ? J ? ? ? ? ? ? ? ? ? ? ? ? ? ? , 2022 .