论文信息 - Femtosecond pulse laser processing of TiN on silicon - 字舞流文

Femtosecond pulse laser processing of TiN on silicon

Jörg Krüger | Wolfgang Kautek | Jörn Bonse | Pascale Rudolph | S. Baudach | W. Kautek | J. Bonse | S. Baudach | J. Krüger | P. Rudolph

[1] M. Stuke,et al. Sub-picosecond UV laser ablation of metals , 1995 .

[2] L. Michalowsky. Neue keramische Werkstoffe , 1994 .

[3] Jason D. Fowlkes,et al. Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation , 1999 .

[4] Juergen Jandeleit,et al. Picosecond laser ablation of thin copper films , 1996 .

[5] Michael F. Becker,et al. Laser-induced damage on single-crystal metal surfaces , 1988 .

[6] Emil Wolf,et al. Principles of Optics: Contents , 1999 .

[7] J. Siegel,et al. The influence of thermal diffusion on laser ablation of metal films , 1994 .

[8] J. Sundgren,et al. A review of the present state of art in hard coatings grown from the vapor phase , 1986 .

[9] A. Tünnermann,et al. Femtosecond, picosecond and nanosecond laser ablation of solids , 1996 .