论文信息 - Effect of hydrogen flow on growth of 3C-SiC heteroepitaxial layers on Si(111) substrates - 字舞流文

Effect of hydrogen flow on growth of 3C-SiC heteroepitaxial layers on Si(111) substrates

Xingfang Liu | Wanshun Zhao | Guosheng Sun | Yiping Zeng | Lei Wang | Yan Guoguo | Fei Yang | Y. Niu | Feng Zhang