Due to their low cost compatibility with replication-based fabrication methods, thermoplastics represent an exceptionally attractive family of materials for the fabrication of lab-on-a-chip platforms. A diverse range of thermoplastic materials suitable for microfluidic fabrication is available, offering a wide selection of mechanical and chemical properties that can be leveraged and further tailored for specific applications. While high-throughput embossing methods such as reel-to-reel processing of thermoplastics is an attractive method for industrial microfluidic chip production, the use of single chip hot embossing is a cost-effective technique for realizing high-quality microfluidic devices during the prototyping stage. Here we describe methods for the replication of microscale features in two thermoplastics, polymethylmethacrylate (PMMA) and polycarbonate (PC), using hot embossing from a silicon template fabricated by deep reactive-ion etching.
[1]
Jikun Liu,et al.
Microfluidic 2-D PAGE using multifunctional in situ polyacrylamide gels and discontinuous buffers.
,
2009,
Lab on a chip.
[2]
Don L DeVoe,et al.
Microfluidic technologies for MALDI‐MS in proteomics
,
2006,
Electrophoresis.
[3]
L. P. Hromada,et al.
Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment.
,
2007,
Lab on a chip.
[4]
D. DeVoe,et al.
Bonding of thermoplastic polymer microfluidics
,
2009
.
[5]
F. Marty,et al.
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
,
2005,
Microelectron. J..