Integrated sensor for non-invasive monitoring of flow in pipes
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A silicon chip fabricated with standard IC technology has been used to monitor air flow in a pipe in a non-invasive way through the pipe wall. Flow detection is based on the measurement of a temperature difference on the chip, which is heated with respect to the flow. The device is direction sensitive and has a zero output in the absence of flow. In the experiment the detection threshold for air flow is approximately 0.1 m/s.
[1] Pasqualina M. Sarro,et al. Thermal sensors based on the seebeck effect , 1986 .
[2] Johan H. Huijsing,et al. Integrated silicon flow-direction sensor , 1989 .
[3] J. H. Huijsing,et al. Monolithic integrated direction-sensitive flow sensor , 1982, IEEE Transactions on Electron Devices.
[4] P. Bradshaw,et al. Thermal methods of flow measurement , 1968 .
[5] Johan H. Huijsing,et al. Integrated flow friction sensor , 1988 .