论文信息 - Silk Polymer Coating with Low Dielectric Constant and High Thermal Stability for Ulsi Interlayer Dielectric - 字舞流文

Silk Polymer Coating with Low Dielectric Constant and High Thermal Stability for Ulsi Interlayer Dielectric

J. Im | Dennis W. Smith | P. Townsend | D. Castillo | Steven J. Martin | J. Godschalx | E. Shaffer | N. Rondan | G. Buske | S. Froelicher | Duane R. Romer | R. DeVries | J. Marshall