From point to extended defects in two-dimensional MoS2: Evolution of atomic structure under electron irradiation

Hannu-Pekka Komsa,1 Simon Kurasch,2 Ossi Lehtinen,2 Ute Kaiser,2 and Arkady V. Krasheninnikov1,3 1Department of Physics, University of Helsinki, P.O. Box 43, 00014 Helsinki, Finland 2Central Facility for Electron Microscopy, Group of Electron Microscopy of Materials Science, University of Ulm, 89081 Ulm, Germany 3Department of Applied Physics, Aalto University, P.O. Box 11100, 00076 Aalto, Finland (Received 12 April 2013; revised manuscript received 19 June 2013; published 2 July 2013)