Tuning the primary resonances of a micro resonator, using piezoelectric actuation

Microbeam dynamics is important in MEMS filters and resonators. In this research, the effect of piezoelectric actuation on the resonance frequencies of a piezoelectrically actuated capacitive clamped-clamped microbeam is studied. The microbeam is sandwiched with piezoelectric layers throughout its entire length. The lower piezoelectric layer is exposed to a combination of a DC and a harmonic excitation voltage. The DC electrostatic voltage is applied to prevent the doubling of the excitation frequency. The traditional resonators are tuned using DC electrostatic actuation, which tunes the resonance frequency only in backward direction on the frequency domain. The proposed model enables tuning the resonance frequencies in both forward and backward directions. For small amplitudes of harmonic excitation and high enough quality factor, the frequency response curves obtained by the shooting method are validated with those of the multiple time scales technique. Unlike the perturbation technique, which imposes limitation on both the amplitude of the harmonic excitation and the quality factor to be applicable, the shooting method can be applied to capture the periodic attractors regardless of how big the amplitude of harmonic excitation and the quality factor are.