The First Virtual Environment Design Studio

A method of evaporating a thin film of TCNQ salt on an oxide dielectric film to produce a thin-film capacitor is disclosed. A source material composed of a TCNQ salt is heated to a predetermined source temperature at a rate of at least 4 DEG C per second. A TCNQ salt is evaporated at the predetermined temperature being controlled within a variation of +/-2 DEG C. An inactive metal is evaporated onto the TCNQ salt film to prevent it from oxidizing the inner surface of the cathode material.