Sound attenuation using microelectromechanical systems fabricated acoustic metamaterials

Unlike traditional rotational gyroscopes, microelectromechanical systems (MEMS) gyroscopes use a vibrating proof mass rather than a rotational mass to sense changes in angular rate. They are also smaller and less expensive than traditional gyroscopes. MEMS gyroscopes are known to be susceptible to the effects of acoustic noise, in particular high frequency and high power acoustic noise. Most notably, this has been proven true in aerospace applications where the noise can reach levels in excess of 120 dB and the noise frequency can exceed 20 kHz. The typical resonant frequency for the proof mass of a MEMS gyroscope is between 3 and 20 kHz. High power, high frequency acoustic noise can disrupt the output signal of the gyroscope to the point that the output becomes unreliable. In recent years, considerable research has focused on the fascinating properties found in metamaterials. A metamaterial is an artificially fabricated device or structure that is engineered to produce desired material responses that can...