Intel StrataFlashTM Memory Technology Overview

The Intel StrataFlash memory technology represents a cost breakthrough for flash memory devices by enabling the storage of two bits of data in a single flash memory transistor. This paper will discuss the evolution of the two bit/cell technology from conception to production. The flash memory business has grown from about $50M in 1987 to roughly $2.5B in 1997 due to its unique mix of functionality and cost. Flash memory devices are now found in virtually every PC and cellular phone and are one of the key components of the emerging digital imaging and audio markets. Cost per bit reduction of flash memory devices has been traditionally achieved by aggressive scaling of the memory cell transistor using silicon process-scaling techniques such as photolithography line width reduction. In an attempt to accelerate the rate of cost reduction beyond that achieved by process scaling, a research program was started in 1992 to develop methods for the reliable storage of multiple bits of data in a single flash memory cell. The Intel StrataFlash two bit/cell memory technology is the first output of the multi-bit per cell storage effort. By storing two bits in a single memory transistor, the memory cell area is effectively cut in half allowing the storage of twice as much data in the same area as the standard single bit per cell technology. This paper provides insight into the Intel StrataFlash memory technology development effort. It discusses the evolution of the two bit/cell capability from conception to production and the challenges that were successfully overcome to produce a high-quality product compatible with the standard single bit per cell devices. This paper also presents examples that showcase the benefits of the current Intel StrataFlash memory devices and discusses some of the driving forces for high density flash memory. Introduction History has shown that as the price of memory drops and the density increases, the application usage and demand for that memory will increase. The cost for semiconductor memories (i.e., DRAM, SRAM, ROM, and flash) is largely determined by the amount of silicon area it takes to store a data bit of information. As with other semiconductor memories, flash memory, which retains its data even when the power is removed, achieves higher density and lower cost through traditional silicon process scaling techniques, such as feature size reduction. To build on process scaling, a concept called MultiLevel-Cell (M.L.C.) technology was introduced. This technology lowers the cost by enabling the storage of multiple bits of data per memory cell thereby reducing the consumption of silicon area. The two bit/cell Intel StrataFlash memory technology provides a cost structure equivalent to the next generation of process technology while using the current generation of process technology equipment. Figure 1 illustrates the substantial acceleration of the rate of cost reduction possible with M.L.C.