论文信息 - CO and CO2 thin-film SnO2 gas sensors on Si substrates

CO and CO2 thin-film SnO2 gas sensors on Si substrates

Abstract Thin-film SnO 2 gas sensors have been structured on Si substrates. The sensors are temperature stable at 900°C in synthetic air for 48 h. No significant outdiffusion of the sensor layers can be observed after annealing. Pt catalysts lead to CO sensors without cross sensitivity to CO 2 . Pt/Ca catalyst combinations also lead to CO 2 gas response. CO 2 sensitivity between 1000 and 10 000 ppm has been demonstrated at 270°C. CO 2 might be indirectly detected via humidity exchange between CO 2 and the heated Ca-catalysed SnO 2 surface.

Gerd Sulz | Gerd Kühner | Ulrich Hoefer | Klaus Steiner | Werner Schweizer

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