Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering

[1]  T. Sugino,et al.  Electrical and optical characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition , 2004 .

[2]  J. Albella,et al.  BCN films with controlled composition obtained by the interaction between molecular beams of B and C with nitrogen ion beams , 2003 .

[3]  A. Masuda,et al.  Preparation of boron–carbon–nitrogen thin films by magnetron sputtering , 2002 .

[4]  Xingwang Zhang,et al.  Ternary BCN thin films deposited by reactive sputtering , 2000 .

[5]  S. T. Lee,et al.  Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering , 2000 .

[6]  M. Yoshimura,et al.  The control of BN and BC bonds in BCN films synthesized using pulsed laser deposition , 2000 .

[7]  T. Sugino,et al.  Field emission characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition , 2000 .

[8]  F. Richter,et al.  Sputtering and chemical erosion during CNx synthesis by ion beam assisted filtered cathodic arc evaporation , 1999 .

[9]  M. Dinescu,et al.  Boron carbon nitride films deposited by sequential pulses laser deposition , 1998 .

[10]  A. Schütze,et al.  Deposition of c-BN films by DC magnetron sputtering , 1998 .

[11]  C. Choy,et al.  Effects of carbon incorporation on the structure and mechanical properties of cubic boron nitride films , 1997 .

[12]  G. Amaratunga,et al.  Boronated tetrahedral amorphous carbon (ta-C:B) , 1997 .

[13]  Miyoko O. Watanabe,et al.  Structural and electrical characterization of BC2N thin films , 1996 .

[14]  Miyoko O. Watanabe,et al.  Bonding characterization of BC2N thin films , 1996 .

[15]  V. Kulikovsky,et al.  Preparation of thin hard boron nitride films by r.f. magnetron sputtering , 1995 .

[16]  E. Gulari,et al.  Filament activated chemical vapor deposition of boron carbide coatings , 1994 .

[17]  M. Morita,et al.  Layered-structure BC[sub 2] N as a negative electrode matrix for rechargeable lithium batteries , 1992 .

[18]  T. Besmann.  Chemical Vapor Deposition in the Boron‐Carbon‐Nitrogen System , 1990 .