Reliability of Microelectromechanical Systems (MEMS)
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[1] Karsten Dyrbye,et al. Packaging of physical sensors for aggressive media applications , 1996 .
[2] Robert Kazinczi,et al. Reliability of silicon nitride as structural material in MEMS , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[3] Allyson L. Hartzell,et al. Reliability methodology for prediction of micromachined accelerometer stiction , 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).
[4] P. Sarro,et al. Surface versus bulk micromachining: the contest for suitable applications , 1998 .
[5] A. D. Romig,et al. High performance microsystem packaging: A perspective , 1997 .
[6] J. Chang,et al. Design rules for a reliable surface micromachined IC sensor , 1995, Proceedings of 1995 IEEE International Reliability Physics Symposium.
[7] R. L. Bratter. Commercial success in the MEMS marketplace , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).
[8] R. Howe,et al. Critical Review: Adhesion in surface micromechanical structures , 1997 .
[9] R. Ramesham,et al. Challenges in interconnection and packaging of microelectromechanical systems (MEMS) , 2000, 2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070).
[10] Walter Lang,et al. Development of micromachined switches with increased reliability , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[11] Jeremy A. Walraven,et al. MEMS reliability in a vibration environment , 2000, 2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059).
[12] Khalil Najafi,et al. A CMOS Dissolved Wafer Process For Integrated P++ Microelectromechanical Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[13] M. R. Douglass,et al. Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD) , 1998, 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173).
[14] Janusz Bryzek,et al. Low-cost, high-volume packaging techniques for silicon sensors and actuators , 1988, IEEE Technical Digest on Solid-State Sensor and Actuator Workshop.
[15] S.B. Brown,et al. Materials reliability in MEMS devices , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[16] B. Valk,et al. Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component , 1996 .
[17] Stephen D. Senturia,et al. Microsensor packaging and system partitioning , 1988 .
[18] W. D. Cowan,et al. Performance and reliability of a new MEMS electrostatic lateral output motor , 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).
[19] G. Kovacs. Micromachined Transducers Sourcebook , 1998 .
[20] M. Madou. Fundamentals of microfabrication , 1997 .
[21] Kensall D. Wise,et al. A High-accuracy Multi-element Silicon Barometric Pressure Sensor , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[22] K. Wise,et al. A high-yield IC-compatible multichannel recording array , 1985, IEEE Transactions on Electron Devices.
[23] Ljubiša Ristić,et al. Sensor Technology and Devices , 1994 .
[24] Srinivas Tadigadapa,et al. Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers , 2001, SPIE MOEMS-MEMS.
[25] E. Jansen,et al. Reliability and long term stability of MEMS , 1996, Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing.
[26] D. M. Tanner. Reliability of surface micromachined MicroElectroMechanical actuators , 2000, 2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400).