CONTROL STRATEGY FOR MEASUREMENT PERFORMANCE ENHANCEMENT OF A MICROMACHINED ACCELEROMETER

Abstract This paper presents the design of a closed-loop micromachined accelerometer using a sensitivity functions shaping approach in order to reach the desired measurement performance. The controller design is based on an identified model of the plant (MEMS, readout circuit and actuator) and a pole placement strategy. Simulation results and real-time application on a prototype show the feasibility and the interest of this methodology for high performance microsystem design.

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