论文信息 - Improving spatial resolution and reducing aspect ratio in multiphoton polymerization nanofabrication

Improving spatial resolution and reducing aspect ratio in multiphoton polymerization nanofabrication

The authors investigate the phenomena affecting lateral spatial resolution (LSR) and aspect ratio (AR) in multiphoton polymerization (MPP) nanofabrication. A LSR of 50nm and an AR of 1.38 were achieved for photocured polymer lines on the surface of a substrate by continuing scanning mode. Theoretical analysis based on the distribution of light intensity in this setup indicates that the LSR could be improved to better than 20nm. The asymmetric shrinkage of voxel in the axial and lateral directions has a significant impact for obtaining features of low AR, which are a critical requirement for construction of micro/nanodevices by MPP nanofabrication.

[1] Yan Li,et al. Reduction in feature size of two-photon polymerization using SCR500 , 2007 .

[2] Satoshi Kawata,et al. Finer features for functional microdevices , 2001, Nature.

[3] Xian-Zi Dong,et al. Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing , 2007 .

[4] Satoshi Kawata,et al. Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting , 2005 .

[5] Satoshi Kawata,et al. Scaling laws of voxels in two-photon photopolymerization nanofabrication , 2003 .

[6] Satoshi Kawata,et al. Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency , 2007 .

[7] Saulius Juodkazis,et al. Three-dimensional horizontal circular spiral photonic crystals with stop gaps below 1μm , 2006 .

[8] S. Kawata,et al. Three-dimensional microfabrication with two-photon-absorbed photopolymerization. , 1997, Optics letters.

[9] Hong‐Bo Sun,et al. Three-dimensional focal spots related to two-photon excitation , 2002 .

[10] Satoshi Kawata,et al. The study on spatial resolution in two-photon induced polymerization , 2006, SPIE MOEMS-MEMS.

[11] Pál Ormos,et al. Complex micromachines produced and driven by light , 2001, CLEO 2002.

[12] Satoshi Kawata,et al. Submicron diamond-lattice photonic crystals produced by two-photon laser nanofabrication , 2003 .