Epitaxial CoSi2 film grown on Si substrate by solid interaction of Co/Ti/Si and TiN/Co/Ti/Si multilayer
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Ping Liu | Bing-Zong Li | Wei-Jun Wu | Kai Shao | Z. Sun | Zhi G. Gu | Wei-Ning Huang | Guo B. Jiang | Zu Y. Zhou
[1] Shyam P Murarka,et al. Silicides for VLSI Applications , 1983 .