Handbook of Surface Metrology

Foreword by Professor D. Dowson GENERAL PHILOSOPHY OF MEASUREMENT Where does surface metrology fit in engineering metrology? Importance of surface metrology SURFACE CHARACTERIZATION-THE NATURE OF SURFACES AND THE SIGNALS OBTAINED FROM THEM Surface roughness characterization Waviness Errors of form Comparisons of definitions for surface metrology and coordinate measuring Characterization of defect shapes on the surface PROCESSING Digital methods Digital properties of random surfaces Fourier transform and the FFT Statistical parameters in digital form Properties and implementation of ambiguity function and Wigner distribution function Digital estimation of reference lines for surface metrology Algorithms Transformation in surface metrology Graphical methods Other methods of processing Surface generation INSTRUMENTATION Introduction and historical Measurement systems Optical techniques for measurement of surfaces Capacitance techniques for measurement of surfaces of slopes Inductance techniques Impedance technique-skin effect Other non-standard techniques Electron microscopy Merit of transducers ERRORS, CALIBRATION, TRACEABILITY AND STANDARDIZATION Nature of errors Deterministic or systematic error model Basic components of accuracy evaluation Basic error theory for a system Propagation of errors Some useful statistical tests for surfaces Uncertainty in instruments-calibration in general Calibration of stylus instruments Calibration of form instruments Parameter variation National and international standards Drawing symbols SURFACE METROLOGY IN MANUFACTURE Manufacturing processes Cutting Abrasive processes Unconventional machining Surface roughness produced by machining difficult materials Surface effects other than geometry Surface geometry-a fingerprint of manufacture SURFACE GEOMETRY-ITS IMPORTANCE IN FUNCTION Two body interaction - static effects Functional properties of contact Two body interactions - dynamic effects General roughness and system life One body interactions One body with radiation (optical) Scattering by other waves Systems function SUMMARY AND CONCLUSIONS Characterization and nature of signal Data processing Measurement of trends Calibration Manufacture Function Overview