Application of nanoparticles dispersed polymer to micropowder blasting mask

Improvements in micropowder blasting have been realized for rapid prototyping of channels in glass substrates. The technique presented in this study consists of laser patterning of Au nanoparticles dispersed polymer and micropowder blasting. The patterned polymer was utilized as a mask material for the subsequent mechanical removal of the glass by the micropowder blasting. Five different polymers were tested for the matrix material. Using a line and space mask pattern of 110 /spl mu/m in width, fabricated channels were created in the glass with a maximum aspect ratio of 2.1. The validity of the micropowder blasting using Au nanoparticles dispersed polymer mask was confirmed; additionally, we demonstrated that the micropowder blasting technique with elevated polymer mask temperature was able to reduce erosion of the polymer mask.

[1]  Michael Curt Elwenspoek,et al.  Mask materials for powder blasting , 2000 .

[2]  O. Tabata,et al.  Laser microfabrication using nano-particles dispersed polymer resist , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[3]  Seppo Leppaevuori,et al.  Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining , 1999, Design, Test, Integration, and Packaging of MEMS/MOEMS.

[4]  Martin A. M. Gijs,et al.  Powder blasting for the realisation of microchips for bio-analytic applications , 2001 .

[5]  H. Fujii,et al.  A Sandblasting Process for Fabrication of Color PDP Phosphor Screens , 1992 .

[6]  P. J. Slikkerveer,et al.  High quality mechanical etching of brittle materials by powder blasting , 2000 .

[7]  I. Hutchings,et al.  Erosion of unfilled elastomers by solid particle impact , 1987 .

[8]  Miko Elwenspoek,et al.  High resolution powder blast micromachining , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).