A predictive analytical modelof3DMIM capacitors forRC IC

AThispaperreports a predictive analytical transmission RLCmodelof3DMIM capacitors ina0.131tm BIGMOStechnology. Theaimofthis predictive modelisto helpcircuit design withcompatible CPU time. Itallows Copper (Cu) Aadjusting process parameters inorder tooptimize electrical features. Themodelhasbeencompared withelectromagnetic simulations andS-parameters measurements upto42GHz.