Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement
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[1] T. Baba,et al. Estimation of polarization crosstalk at a micro-bend in Si-photonic wire waveguide , 2004, Journal of Lightwave Technology.
[2] Han-Ku Cho,et al. Effects of various plasma pretreatments on 193 nm photoresist and linewidth roughness after etching , 2006 .
[3] P. Dumon,et al. Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography , 2009, Journal of Lightwave Technology.
[4] D. Van Thourhout,et al. Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.
[5] L C Kimerling,et al. Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction. , 2001, Optics letters.
[6] Vien Van,et al. Ultracompact SOI Microring Add–Drop Filter With Wide Bandwidth and Wide FSR , 2009, IEEE Photonics Technology Letters.
[7] S. Spector,et al. Silicon waveguide sidewall smoothing by wet chemical oxidation , 2005, Journal of Lightwave Technology.
[8] G. G. Stokes. "J." , 1890, The New Yale Book of Quotations.
[9] Toshihiko Baba,et al. Mach–Zehnder Interferometers Composed of µ-Bends and µ-Branches in a Si Photonic Wire Waveguide , 2005 .
[10] Sailing He,et al. Comparative Study of Losses in Ultrasharp Silicon-on-Insulator Nanowire Bends , 2009, IEEE Journal of Selected Topics in Quantum Electronics.
[11] R. Baets,et al. Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides , 2006 .