The effects of cu on field aided lateral crystallization (FALC) of amorphous silicon (a-si) films
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D. Choi | Jae-Bok Lee | C. Kim | Se-Youl Kwon
[1] D. Choi,et al. The Influence of Cu and Au on Field Aided Lateral Crystallization of Amorphous Silicon Films , 2000 .
[2] D. Choi,et al. Electrical characteristics of thin-film transistors using field-aided lateral crystallization , 1999 .
[3] D. Choi,et al. Polycrystalline thin film transistors fabricated by FALC (field aided lateral crystallization) technique , 1999 .
[4] D. Choi,et al. Field Aided Lateral Crystallization of Amorphous Silicon Thin Film , 1999 .
[5] Seung-Ki Joo,et al. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization , 1996 .
[6] Seung-Ki Joo,et al. PD INDUCED LATERAL CRYSTALLIZATION OF AMORPHOUS SI THIN FILMS , 1995 .
[7] C. Hayzelden,et al. Silicide formation and silicide‐mediated crystallization of nickel‐implanted amorphous silicon thin films , 1993 .
[8] J. W. Mayer,et al. In situ observation of fractal growth during a‐Si crystallization in a Cu3Si matrix , 1991 .
[9] F. d'Heurle,et al. The formation of Cu3Si: Marker experiments , 1990 .
[10] M.-A. Nicolet,et al. Transition‐metal silicides formed by ion mixing and by thermal annealing: Which species moves? , 1985 .
[11] M. Nicolet,et al. A structure marker study for Pd2Si formation: Pd moves in epitaxial Pd2Si , 1985 .
[12] F. d'Heurle,et al. Diffusion in intermetallic compounds with the CaF2 structure: A marker study of the formation of NiSi2 thin films , 1982 .
[13] K. Nakashima,et al. Low temperature diffusion of Au into Si in the Si(substrate)-Au(film) system☆ , 1975 .
[14] L. Berthoud,et al. Aluminium spearing in silicon integrated circuits , 1973 .
[15] R. S. Wagner,et al. VAPOR‐LIQUID‐SOLID MECHANISM OF SINGLE CRYSTAL GROWTH , 1964 .