论文信息 - Growth of Dysprosium-, Scandium-, and Hafnium-based Third Generation High-κ Dielectrics by Atomic Vapor Deposition† - 字舞流文

Growth of Dysprosium-, Scandium-, and Hafnium-based Third Generation High-κ Dielectrics by Atomic Vapor Deposition†

C. Adelmann | A. Franquet | J. Schubert | T. Conard | S. Gendt | M. Roeckerath | B. Brijs | C. Lohe | S. Elshocht | P. Lehnen | Chao Zhao | O. Boissière