OPTICAL TESTING AND FINITE ELEMENT ANALYSIS OF EIGENFRE-QUENCY IN THE DOUBLE LINEAR VIBRATORY MICRO-GYROSCOPE

Study of eigenfrequency is key to the design of the micromechanical gyroscope. A series of micro-gyroscopes are tested by the use of high-speed camera, microscope and digital image correlation technique. The presented optical testing method is simple to set up, and has a high accuracy. The testing results agree well with those of the finite element method, showing that it is reliable and practical to use the finite element modal for micro electro-mechanical system analysis. Using the finite element method, the effects of structural size of micro-gyroscope on its natural frequency are investigated, which can help the design of micro-gyroscope.