论文信息 - The Effect of Substrate Temperature on the Properties of Nanostructured Silicon Carbide Films Deposited by Hypersonic Plasma Particle Deposition - 字舞流文

The Effect of Substrate Temperature on the Properties of Nanostructured Silicon Carbide Films Deposited by Hypersonic Plasma Particle Deposition

P. Mcmurry | J. Heberlein | W. Gerberich | S. Girshick | N. Tymiak | N. Rao | J. Heberlein | W. W. Gerberich | A. Neuman | S. L. Girshick | J. Blum | Z. Wong | P. H. McMurry | J.V.R. Heberlein