Metal Oxide Nanoarrays for Chemical Sensing: A Review of Fabrication Methods, Sensing Modes, and Their Inter-correlations

In recent years, engineered nanostructure assemblies such as nanowire arrays have attracted much research attention due to their unique chemical and functional characteristics collectively. The engineered nano-assemblies usually carry the characteristics distinct from bulk as a result of a size effect in their comprised elemental building blocks. The nanoscale size induced high surface-to-volume ratio is a fundamental attribute responsible for various chemical and physical properties required in various technologically important applications such as catalysts and sensors. This review article surveys the latest progress in engineered metal oxide nanostructure arrays, i.e., nanoarrays, for advanced chemical sensors’ design and application. It starts with an overview of gaseous chemical sensors followed by surveys of various fabrication methods and routes for metal oxide nanoarrays. Different sensing modes and corresponding applications have been highlighted in the mixed gaseous chemical sensing, which provides new approaches and perspectives to meet the challenges of selective gas sensing, such as the cross-sensitivity and inter-correlation of multiple sensing signals.