论文信息 - Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity - 字舞流文

Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity

Soft x-ray reflectivity (SXR) of Cr/Sc multilayer with bilayer thickness of =1.56 nm was increased by 100% by an intentional introduction of nitrogen during magnetron sputtering. Multilayers depos ...

Eric M. Gullikson | Fredrik Eriksson | Jens Birch | Naureen Ghafoor | Lars Hultman

[1] David L. Windt,et al. IMD—software for modeling the optical properties of multilayer films , 1998 .

[2] E. Brandt. Computer simulation of density and pressure variations in amorphous metals , 1984 .

[3] H. Hertz,et al. High-reflectivity Cr/Sc multilayer condenser for compact soft x-ray microscopy , 2006 .

[4] N N Salashchenko,et al. Cr /sc multilayers for the soft-x-ray range. , 1998, Applied optics.

[5] F. Eriksson,et al. Single crystal CrN/ScN superlattice soft X-ray mirrors : epitaxial growth, structure, and properties , 2006 .

[6] N. N. Salashchenko,et al. Short-period X-ray multilayers based on , 1997 .

[7] F. Eriksson,et al. Effects of ion-assisted growth on the layer definition in Cr/Sc multilayers , 2008 .

[8] Torsten Feigl,et al. Chromium-scandium multilayer mirrors for the nitrogen K(alpha) line in the water window region. , 2002, Applied optics.

[9] P. Jonnard,et al. X-ray spectroscopic application of Cr∕Sc periodic multilayers , 2007 .

[10] J. Birch,et al. Real time measurements of surface growth evolution in magnetron sputtered single crystal Mo/V superlattices using in situ reflection high energy electron diffraction analysis , 1999 .

[11] Y. Chushkin,et al. Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability , 2006 .