Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection

This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy axis (EZ) exhibit unique mechanical/ electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (kt2 ∼ 2%) — the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection.

[1]  S. Tadigadapa,et al.  Micromachined magnetoflexoelastic resonator based magnetometer , 2015 .

[2]  Sebastian Zabel,et al.  Phase modulated magnetoelectric delta-E effect sensor for sub-nano tesla magnetic fields , 2015 .

[3]  A. Tocchio,et al.  100 µA, 320 nT/vHz, 3-AXIS Lorentz force MEMS magnetometer , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[4]  David A. Horsley,et al.  Force-rebalanced Lorentz force magnetometer based on a micromachined oscillator , 2015 .

[5]  R. Joyce,et al.  UHF piezoelectric quartz mems magnetometers based on acoustic coupling of flexural and thickness shear modes , 2015, IEEE/LEOS International Conference on Optical MEMS.

[6]  Yu Hui,et al.  High Resolution Magnetometer Based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator , 2015, Journal of Microelectromechanical Systems.

[7]  J. Gutiérrez,et al.  Influence of annealing temperature on the magnetic and magnetoelastic properties in Fe-Co-B metallic glasses , 2003 .

[8]  C. Graham,et al.  Introduction to Magnetic Materials , 1972 .

[9]  G. Piazza,et al.  Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

[10]  S. Pourkamali,et al.  Lorentz force MEMS magnetometer with frequency modulated output , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).